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MEMSnet Home: MEMS-Talk: Sputtering SiO2/Si3N4
Sputtering SiO2/Si3N4
2005-11-18
Jun Ni
Sputtering SiO2/Si3N4
Jun Ni
2005-11-18
Hallo all,

I manage to sputter a SiO2 layer on a metal layer. The thickness is expected
to be 500 nm. What could be the suggestive temperature and How long would it
take?

Thanks in advance

Jun Ni

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