Hi Pawel,
You could use either evaporation or sputtering to do this. I still tried by
means of plasma polymerization too, but it is just PTFE-like film, because
there is still some hydrogen in the monomer what I used.

Regards
Xuemei

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
M. Eng. Xuemei Wang

Adhesion and Thin Films
Interface Chemistry and Surface Engineering
Max-Planck-Institute for Iron Research
Max-Planck-Str. 1
40237 Duesseldorf
Germany
Tel: 0049-211-6792445
Fax: 0049-211-6792218

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Pawel Janus
Sent: Friday, November 18, 2005 8:01 AM
To: [email protected]
Subject: [mems-talk] PTFE coating

Hi all,
I'm looking for PTFE coating provider. I'd like to deposit teflon on
silicon/silicon dioxide layer. I would be grateful for any information.