Pawel,

If you are not completely fixed on PTFE, then there are a couple of
spin-on possibilities for coating:

DuPont's Amorphous Fluoropolymer - Teflon AF material

Asahi Glass Company CyTop line

Both of these materials are treated similar to photoresist, and come in
various grades for a variety of thicknesses.

Best Regards,
Chad Brubaker

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Pawel Janus
Sent: Friday, November 18, 2005 12:01 AM
To: [email protected]
Subject: [mems-talk] PTFE coating

Hi all,
I'm looking for PTFE coating provider. I'd like to deposit teflon on
silicon/silicon dioxide layer. I would be grateful for any information.