Concentrated HF is the only etchant I know that removes silicon nitride
without much damage to silicon.  However conc HF is much too slow.  Is there
an etchant that removes nitride quickly but does not harm silicon?

Thank you in advance.

Roger Brennan
3060 Reuben Drive
Reno, NV 89502
Home: [email protected]
Home: 775-825-3060

Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
Work: [email protected]
Work: 775-853-5900 ext 108