Andrew,
Look up mat-vac.com or kurt-lesker on the web. They have good data regarding
the liners etc. the evap process is usually described well in the thickness
monitor manuals.
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrew Xiang
Sent: Tuesday, November 22, 2005 10:02 PM
To: General MEMS discussion
Subject: [mems-talk] EBEAM guideline for Al Au evaporation

We just got the EBEAM system with 6 pockets, 10KV, 15KW.

For Al and Au (separate) thin film deposition, does anyone have some
guideline for me to follow?
things like what kind of crucible liner? ramp up/down time? How do you tell
the Al pellets have melted?
How fast can you ramp up for fast evapoaration?

Is there some reference that we can lookup for different material that we
can use as guideline to establish our process?
We will do non-conductive(sublime) material in the future also.

thanks
Andrew

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