Hi all,
Has anyone ever tried fabricating Au patterns on mica?
We have patterned using a mask aligner 2 electrodes with a gap in between each
electrode of 5um only to find the thermal evaporation of 5nm Cr/40nm Au after
lift-off doesn't adhere well, leaving very rough edges where the edges should be
straight. The photolithography stage goes well. If anyone has any ideas or
experience working with au/mica, we'll be grateful.
Cheers,
Jeff kettle
Cardiff University