Hello,
I'm trying to remove a 15 micron thick layer of gold over silica glass. I have
some TFA old etch from Transene, but it takes a long time (1 hour) to do the job
- I would like to reduce the etch time to about 2-3 minutes. Besides Aqua
Regia, what are the other solutions I could experiment with that could etch
faster?
I know aqua regia should do the job, but I would have to buy the nitric and
chloridric acids and I'm not sure which grades are best for this - any hints on
what acid concentrations and grades of HCl HNO3 to use in order to etch 15
microns of Au in 2-3 minutes?
Thanks,
Sébastien Allard
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R&D Process Engineer
LxSix Photonics