You might look into resist recipes that give a "mushroom" - that is, give a
resist profile with an overhang.  If that successfully keeps the metal from
forming a continous sheet, it could prevent the ripping you  are seeing, and
you wouldn't have to work on the metal adhesion to mica.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA 20151

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Jeff Kettle
Sent: Wednesday, November 30, 2005 9:12 AM
To: [email protected]
Subject: [mems-talk] Fabrication of Au structures on mica


Hi all,

Has anyone ever tried fabricating Au patterns on mica?

We have patterned using a mask aligner 2 electrodes with a gap in between
each electrode of 5um only to find the thermal evaporation of 5nm Cr/40nm Au
after lift-off doesn't adhere well, leaving very rough edges where the edges
should be straight. The photolithography stage goes well. If anyone has any
ideas or experience working with au/mica, we'll be grateful.