Hello all,

Unfortunately, TFA gold etch from Transene is in fact a KI+I2 solution.  Just
from the safety point of vue, I agree with trying to avoid aqua regia, but it
may be an unfortunate necessary step.

Any thoughts?

Thanks!

Sébastien Allard
LxSix Photonics

-----Original Message-----
From:  Michael D Martin
To: [email protected]
Subject: Re: [mems-talk] Gold etching

Not sure about the etch rate but KI (potassium iodide) will etch nicely
if your device can tolerate the ions. I would avoid aqua regia if
possible. It is sometimes difficult to get photoresists to hold up well
for long etches in it.

-Mike M.
 U. of Louisville