Why not use lift off.  Dimensional control down to 0.08 microns.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353

-----Original Message-----
From: Sebastien Allard
Sent: Friday, December 02, 2005 4:34 AM
To: General MEMS discussion
Subject: [mems-talk] Gold etching

Hello all,

Unfortunately, TFA gold etch from Transene is in fact a KI+I2 solution.
Just from the safety point of vue, I agree with trying to avoid aqua
regia, but it may be an unfortunate necessary step.

Any thoughts?

Thanks!

Sébastien Allard
LxSix Photonics