Yu Chen,

PMMA can be crosslinked using DUV (248nm) exposure - it just requires a
pretty big dose (>500mJ/cm2, according to Microchem -
www.microchem.com).

Best Regards,
Chad Brubaker


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of [email protected]
Sent: Thursday, December 01, 2005 4:55 PM
To: General MEMS discussion; sokwon Paik
Subject: [mems-talk] Crosslink PMMA

Hello all:

I want to crosslink PMMA and I know high dose e-beam exposure can do
this.
but what I want is to cross link large area of PMMA which can not be
done by e-beam.

can UV work? somebody asked this before but I could not find the
answer.

what should be the condition?

any suggestions are welcome.