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MEMSnet Home: MEMS-Talk: SU8 maximum aspect ratio
1737 bonding with temperature below 650C
2005-11-21
Zhang Peng
2005-11-21
Brubaker Chad
SU8 maximum aspect ratio
2005-12-08
erkin seker
2005-12-13
Ren Yang
SU8 maximum aspect ratio
erkin seker
2005-12-08
Hi,

I want to build vertical SU8 beams on a silicon or quartz substrate, and I
would like to have an idea about the maximum aspect ratio I can get with
thick (>100um) SU8 resist to yield near vertical sidewalls and intact
structures.  Could anybody please forward his/her idea on this?

Thank you.


erkin


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