Dear erkin,

I have succeeded to obtain 40:1 in 1000um, and someone in Sadia has succeeded to
obtain about 60:1 in 700um.

best regards

Peng

>Hi,
>
>I want to build vertical SU8 beams on a silicon or quartz substrate, and I
>would like to have an idea about the maximum aspect ratio I can get with
>thick (>100um) SU8 resist to yield near vertical sidewalls and intact
>structures.  Could anybody please forward his/her idea on this?
>