Peter,

Concerning your question about a stripper for SU-8 I can say that due to
the fact that SU-8 is based on Epoxy chemistry it is difficult to remove
with conventional wet strippers or chemistries...There are however
methods that have been proven to work in removing cured SU-8, those
include RIE systems that utilise Oxygen in conjunction with a
Fluorinated gas, such as CF4, NF3 or SF6...TEPLA have a system that is
being installed in many places where complete removal of the resist
layer is required...

The OmniCoat product that we developed works well on certain substrates
and certain aspect ratios in conjunction with our Remover PG product...

I can tell you that we are in the process of commercialising a resist
that has similar lithographic performance to SU-8 but is more easily
stripped...Once we have completed the commercialisation I will be happy
to share information...

Best regards,

------------------------------------
MicroChem Corp.
Mark Shaw
Epoxy Business Unit - Sales and Technical Support Manager
[email protected]
1254 Chestnut Street
Newton, MA 02464
tel: 617-965-5511 ext 308
fax: 617-965-5818
mobile: 617-407-9490
www.microchem.com
------------------------------------

-----Message: 1
Date: Mon, 12 Dec 2005 07:19:48 +0100
From: "P.E.M. Kuijpers" 
Subject: Re: [mems-talk] SU-8 remover

Hello,

What is the SU-8 remover you mentioned!
Is this for removing fully cured SU-8?

Thanks in advance.
Peter Kuijpers
Philips Applied Technologies/ EP&TF