Hi all,
Does anybody know if butanol will remove Shipley 1800 Resists?
My inclination tells me that most organic solvents will do it.
I am actually trying to spin SOG on top of patterned resist but
unfortunately the SOG I have now uses acetone as a solvent. I have found
some SOG that only uses butanol. Any suggestions?
Many thanks in advance for your help!
Brian Fung
Photonics Group
Dept. of Electrical and Computer Engineering
University of Toronto