Hi Richard,
I'm joining this late but I'm sensing some despair from you about this,
don't give up yet. You can pattern Au with Argon plasmas.
Sputter etching will do the job at about >10nm/min depending on your tool.
Do you have access to an RIE etcher? If not you can buy one, I work for
Oxford Instruments Plasma Technology and we sell tools that will do just
this. If you have one of our tools already send me a mail and I'll give you
a recipe you can use.

Cheers,
Mark


-----Original Message-----
From: Richard [mailto:[email protected]]
Sent: 13 December 2005 15:17
To: General MEMS discussion
Subject: Re: [mems-talk] RE: Argon plasma for gold etching

Hi, All,

   Thanks for all your help.
   It seems like unrealistic to use Argon to pattern gold.

Richard