I wanna try to use SU-8 to lift-off metal layer.
Is there anyone trying this process before??
Should I just pre-bake 65 and 95 C and then deposit the metal layer??
Or I need to expose to UV and then post-bake?
Can I use Remover PR with Ultrasound and at 60 C for the lift-off??
Is there any Microchem stuff who can answer my question??



Lung-hao Hu

Graduate Student

Dept.of Mechanical Engineering
Univ.of Colorado Boulder
UCB 427 CO 80309 U.S.A
Email:[email protected]
Tel:303-786-1702(H)
    303-492-0877(Lab)
Fax:303-492-3498