Does any one have a source for deep silicon etching on 200mm wafers??  I'm
looking for depths in the range of 100-200µ, large (50µ plus)
features.  Please feel free to contact me directly.

Mac McReynolds
Process Development Manager
Caliper Life Sciences
605 Fairchild Drive
Mountain View, CA 94043-2234
Tel:  650-623-0710
Fax:  650-623-0521