Hello,

Why don't you use the HF vapour etching? The etching rate is about 5
microns/hour. You can find more information in the following link.


http://www.idonus.com/

Good luck


Selon Jeff chen :

> Dear all,
>
> When I checked the references and found the etching rate of BHF is
> 100nm/min, if I wanna etch out 5 nm SiO2, just need 3 sec. That's too
> short to operate.
> Can I dilute the BHF to 1:10 concentration? Just using water to dilute it?
> How can I check the etching rate for the diluted BHF?