There's also the (remote) possibility that you can use piranha. It doesn't
attack gold or chrome very quickly. It will, however, eat aluminum like
crazy, and it may attack the adhesion layers you used. What is directly
underneath the PR?

Those heated strippers do work pretty well. I've used Baker ALEG-355 at
80C, and it cleaned hard-baked PR off well enough for a PECVD system to
work.

my 2cents,
Jesse Fowler




Sven Holmström 
Sent by: [email protected]
12/22/2005 03:13 PM
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Re: [mems-talk] Removing dry resist






Thanks for the answers. Most of you say Oxygen plasma, which we have
been thinking of too. But as of now we don't have that available
locally (we could send it away though, for certain cost).

On 12/22/05, Shile  wrote:
> Try a photoresist stripper.  I'm not aware of acetone as an ingredient
> in any commercially made resist stripper.