HI Fellows,

BTW: you are using glass, could the diffraction and reflection effect be
stronger and cause surrounding SU-8 cross-linked? possibly... can you
try the process with a Si and compare? thanks.

zeta yu

[email protected] wrote:

>Thanks for the reply. As you expected, the hotplate and exposure lamp
>are always on. I did change developer after each trial and clean the
>beaker by rinsing with developer. Is it possible there is still some
>trace solvent (say cyclopentanone, the solvent for su 8, or water
>vapor) remaining in the developer?
>But I just blowed dust off the coverglass with nitrogen without
>cleaning it with, for example, IPA. I guess it is related to the
>adhesion between coverglass and su 8, but not sure which step in the
>protocol determines this.
>
>Best,
>Liu Yu
>