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MEMSnet Home: MEMS-Talk: I want etch polysilicon only not Pyrex area
I want etch polysilicon only not Pyrex area
2005-12-29
sokwon Paik
2006-01-16
Aegis Liang
I want etch polysilicon only not Pyrex area
sokwon Paik
2005-12-29
Hi

  I want to deposit polysilicon on top of Pyrex and want to etch out only
polysilicon area of designated part.

  I don't want to etch Pyrex. So is there any dry/wet etching method I can etch
polysilicon area only?

  One more question. Does anybody know the transmit wavelength of polysilicon?

  thanks,

  Sokwon
reply
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