Thanks for all of your suggestions. As for the difference between Si
and glass, I had no such problem when dealing with Si substrate.
Somebody mentioned using a piece of black paper beneath the
coverglass, but I never tried. I definitely need to try you guys'
suggestion one by one.

Best,
Liu Yu

On 12/28/05, Zeta Tak For YU  wrote:
> HI Fellows,
>
> BTW: you are using glass, could the diffraction and reflection effect be
> stronger and cause surrounding SU-8 cross-linked? possibly... can you
> try the process with a Si and compare? thanks.
>
> zeta yu
>