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MEMSnet Home: MEMS-Talk: RE:Electroless copper plating on Su-8 structures
RE:Electroless copper plating on Su-8 structures
2006-01-01
Devarajan Balaraman
RE:Electroless copper plating on Su-8 structures
Devarajan Balaraman
2006-01-01
Chao,
Electroless plating on SU-8 is pretty tricky becasue the surface is
exteremely smooth. You can roughen the surface using oxyen/Fluorine plasma
or some wet process like permanganate etching. Look for papers from Georgia
Tech (I am sure there are others too) for more specific details on
roughening process.

Regards,
Dev

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