Sokwon,

I'd be interested in knowing how you performed an anodic bond between
quartz and silicon - this is not a normal process, since for anodic
bonding to work, the glass must contain ionic species (such as sodium).

As to anodically bonding two transparent substrates (quartz-Pyrex, etc.)
the only way I know of to do this is to place a thin layer of silicon on
one of the substrates, which can eliminate (or at least reduce) the
transparency, depending on thickness.

Anodic bonding needs to take place between the ionically contaminated
glass (as mentioned above)and a material capable of bonding to oxygen
(for instance, Silicon bonding with oxygen to for silicon dioxide - the
standard anodic bond). Most transparent materials I know of (including
all of the ones mentioned below) are already fully oxygenated, and thus
cannot further bond to oxygen, so no chemical bond can occur between the
substrates.

Best Regards,
Chad Brubaker

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of sokwon Paik
Sent: Monday, January 02, 2006 5:53 PM
To: [email protected]
Subject: [mems-talk] Did anybody anodic bond with two
transparentmaterial?(like glass-quartz)

Hi

  I need to do the wafer bonding with glass-quartz or with whatever
material as long as they are transparent.

  I just tried quartz-si wafer bonding and worked fine but I need to
bond two transparent glass like materials.(quartz, pyrex, soda lime
glass, crown, sapphire......)

  If you know anything about this then please let me know. and one more
thing .....

  Or if you know the good method other than anodic bonding for the two
glass like material then please let me know.