Chad,

  Thank you for your reply. I did anodic bond at Georgia tech clean room and it
looks quartz and silicon wafer boned well together. I didn't do the LPCVD for
sio2 deposition and did the bonding process directly.

  Thanks,

  Sokwon

Brubaker Chad  wrote:
  Sokwon,

I'd be interested in knowing how you performed an anodic bond between
quartz and silicon - this is not a normal process, since for anodic
bonding to work, the glass must contain ionic species (such as sodium).

As to anodically bonding two transparent substrates (quartz-Pyrex, etc.)
the only way I know of to do this is to place a thin layer of silicon on
one of the substrates, which can eliminate (or at least reduce) the
transparency, depending on thickness.

Anodic bonding needs to take place between the ionically contaminated
glass (as mentioned above)and a material capable of bonding to oxygen
(for instance, Silicon bonding with oxygen to for silicon dioxide - the
standard anodic bond). Most transparent materials I know of (including
all of the ones mentioned below) are already fully oxygenated, and thus
cannot further bond to oxygen, so no chemical bond can occur between the
substrates.