You can't resolve 25nm features with >300nm optics
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Pratik Chaturvedi
Sent: Sunday, January 08, 2006 1:38 AM
To: [email protected]
Subject: [mems-talk] High resolution photoresist

Hello,
    I'm looking for a photoresist (380 nm working wavelength) capable of
resolving 20-25 nm features. Does anyone have worked or know of some
material that could be used for the purpose?
   thanks
  -pratik