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MEMSnet Home: MEMS-Talk: PMMA solution
hot plate recommendation
2006-01-06
[email protected]
2006-01-07
Neal Ricks
PMMA solution
2006-01-09
Jure Simcic
2006-01-09
Hongjun-ECE
2006-01-10
Sebastien Allard
hot plate or infrared?
2006-01-10
Andrew Xiang
vacuum baking?
2006-01-10
Andrew Xiang
Wet etching? Dry etching?
2006-01-10
sokwon Paik
2006-01-11
Hongjun-ECE
2006-01-16
Aegis Liang
2006-01-10
Novak Farrington
PMMA solution
Jure Simcic
2006-01-09
Hello everybody,

I would like to spin-coat thick layers (10 mu or more) of PMMA in a single
shot. According to the data from Microchem
http://www.microchem.com/products/pdf/PMMA_Data_Sheet.pdf only about 5
micron thick layers can be achieved with 10% solution of 950PMMA in anisole
or chlorbenzene. Is it possible to order undissolved PMMA of proper
molecular weight (950K) in a form of powder, make more concentrated solution
(20 or 30%) and consequently spin-coat thicker layers?
Secondly I am looking for one-side polished, 100, 2" Silicon wafers -
economy option. Any recommendation would be highly appreciated.
Thanks,

Jure Simcic

reply
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