Just curious, why not simply leave some 950C10 or 950A11 in air for
evaporation until you get the thicker? Since PMMA keeps sensitivity at 180C,
you can even heat up for faster evaporation.
Please let me know this is working,
Hongjun
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Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology Core Facility
(NCF formerly MAL)
University of Illinois at Chicago
3064 ERF Building
842 W. Taylor St., Chicago, IL 60607
Tel. 312-355-1259, Fax: 312-413-0447
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-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jure Simcic
Sent: Monday, January 09, 2006 4:27 AM
To: General MEMS discussion
Subject: [mems-talk] PMMA solution
Hello everybody,
I would like to spin-coat thick layers (10 mu or more) of PMMA in a single
shot. According to the data from Microchem
http://www.microchem.com/products/pdf/PMMA_Data_Sheet.pdf only about 5
micron thick layers can be achieved with 10% solution of 950PMMA in anisole
or chlorbenzene. Is it possible to order undissolved PMMA of proper
molecular weight (950K) in a form of powder, make more concentrated solution
(20 or 30%) and consequently spin-coat thicker layers?
Secondly I am looking for one-side polished, 100, 2" Silicon wafers -
economy option. Any recommendation would be highly appreciated.
Thanks,
Jure Simcic
