Thermal CVD of parylene is very, very common.  Thickness is (relatively)
controllable and it shouldn't be too difficult to find someone who can put
some down for you.  It's fairly robust for a polymer but will etch in many
(most, all?) RIE processes.  I believe there's a fluorinated version which
should be more robust in certain RIE processes.

Do a google search on parylene, there's a ton of information out there.

Good luck,
Matt

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of yilei zhang
Sent: Monday, January 09, 2006 2:00 PM
To: [email protected]
Subject: [mems-talk] evaporation coating photoresist or polymer

Hello colleagues:
Is there any simple way to coat a sample without using spin coating? I hope
the coating can survive in the following DRIE. I am thinking an evaporation
way, but was told metal can not be used in DRIE chamber. So is there any
photoresist or polymer is convenient for evaporation coating? Your
suggestions will be highly appreciated.

Regards,
Yilei Zhang