dear list,

Does anybody knows why there is always a white layer covering patterns
after RIE of samples composed by three layers
S18-05 (up) - Silica (middle) - metal (down)
on a glass support, and eventually how to avoid such white layer (I
supposed it comes from S18-05 etching...)

We have used first CHF3, then O2 to remove the remain S18-05, and then
O2 and Ar to etch the metal.

Thanks !

Frederic