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MEMSnet Home: MEMS-Talk: hot plate recommendation
hot plate recommendation
2006-01-06
[email protected]
2006-01-07
Neal Ricks
PMMA solution
2006-01-09
Jure Simcic
2006-01-09
Hongjun-ECE
2006-01-10
Sebastien Allard
hot plate or infrared?
2006-01-10
Andrew Xiang
vacuum baking?
2006-01-10
Andrew Xiang
Wet etching? Dry etching?
2006-01-10
sokwon Paik
2006-01-11
Hongjun-ECE
2006-01-16
Aegis Liang
2006-01-10
Novak Farrington
hot plate recommendation
Sebastien Allard
2006-01-10
Hello,

I am familiar with Sigma Systems Corporation's C4 model - very good hot plate
with digital control, but maybe expensive.  You would need liquid nitrogen in
order to control the cooling.  There are different sizes of plates available
from this company.

www.sigmasystem.com

Good luck!

Sébastien Allard
------------------------------------------
R&D Process Engineer
LxSix Photonics
520 McCaffrey
Saint-Laurent, Québec, H4T 1N1
Phone : (514) 599-5714 ext. 267
Fax : (514) 599-5729
[email protected]

-----Original Message-----
From: [email protected]
Sent: 6 janvier 2006 17:37
To: General MEMS discussion
Subject: [mems-talk] hot plate recommendation

Hello all,

I'm looking to purchase a programmable hot plate for our lab to do baking of
photoresists for photolithography. I'm looking for one where I can control the
ramp of heating and cooling (i.e. tell it to increase its temperature at 2 C/min
then stay at some temp for a while and then cool at 1 C/min). If anyone could
recommend a brand or model to me I would greatly appreciate it.
reply
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