Hello,

I am wondering where I can find the info regarding the requsted exposure
dose for 1um thick OCG 825 (10um line width) and 10um AZP4620(10um line
width). I believe the dose is related to the thickness and line width
through some function or equation, but just could not find it out. Anyone
can give me a hand?

Thanks

BTW: I am using Karl Suss aligner.

Michael