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MEMSnet Home: MEMS-Talk: hot plate or infrared?
hot plate recommendation
2006-01-06
[email protected]
2006-01-07
Neal Ricks
PMMA solution
2006-01-09
Jure Simcic
2006-01-09
Hongjun-ECE
2006-01-10
Sebastien Allard
hot plate or infrared?
2006-01-10
Andrew Xiang
vacuum baking?
2006-01-10
Andrew Xiang
Wet etching? Dry etching?
2006-01-10
sokwon Paik
2006-01-11
Hongjun-ECE
2006-01-16
Aegis Liang
2006-01-10
Novak Farrington
hot plate or infrared?
Andrew Xiang
2006-01-10
My substrate is concave shaped, the heat will not be uniform on a hot plate
and it will form ring.
Has anyone tried infrared baking?

-Andrew

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