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MEMSnet Home: MEMS-Talk: vacuum baking?
hot plate recommendation
2006-01-06
[email protected]
2006-01-07
Neal Ricks
PMMA solution
2006-01-09
Jure Simcic
2006-01-09
Hongjun-ECE
2006-01-10
Sebastien Allard
hot plate or infrared?
2006-01-10
Andrew Xiang
vacuum baking?
2006-01-10
Andrew Xiang
Wet etching? Dry etching?
2006-01-10
sokwon Paik
2006-01-11
Hongjun-ECE
2006-01-16
Aegis Liang
2006-01-10
Novak Farrington
vacuum baking?
Andrew Xiang
2006-01-10
I wonder if it is a good idea to use vacuum oven to pre-post bake PR?
The heat transfer will be from metal to the substrate, not from air, so
there will be no skin effect.

Any comments?

-Andrew

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