Greetings,
You may try Galium,I know this works however it depends how strong a bond
you need.
Galium metal becomes a  liquid at around 30C IF MY MEMORY SERVES ME RIGHT
Excellent thermal contact great heat transfer.
Kind Regards
Walter
www.elume.com

-----Original Message-----
From: Martin J Prest [mailto:[email protected]]
Sent: Wednesday, January 11, 2006 8:16 AM
To: [email protected]
Subject: [mems-talk] temporary wafer bond?

Can anybody suggest a good way to temporarily bond a silicon wafer to a
handle wafer when through wafer etching with a DRIE system?

Ideally, this should be something that can be spread on the handle to a
uniform thickness and make a good thermal contact. It should also be easy to
remove afterwards using heat and/or solvent, leaving no residue on the
wafer.

I've tried photo-resist, but I'm worried that the thermal contact is not
very good.

Regards,

Martin.