Prem,
we achieved a layer thickness of 0.54 um with diluted SU-8.
We diluted SU-8-50 with GBL (gamma-butyro-lactone).
The ratio was 1:1 by volume, which is 1 : 0.93 by weight  (SU-8-50 : GBL).
After adding the solvent, the mixture was stirred for 1 day using a
magnetic stirrer.
With a spinner speed of 4000 rpm (for 40 seconds) we got 0.77 um layer
thickness,
with 7000 rpm we got 0.54 um.


Best regards
Peter Svasek

Prem Pal wrote:

>Dear Researchers
>Which SU-8 should I use for depositing a layer of thickness less than 1 um. If
any have done it, please give me the recipe for achieving this thickness by spin
coating.
>Thanks in advance
>
>Prem Pal
>Yonsei University Seoul