You mean resist contrast curve? Should you be able to get it from the
manufacturer's data sheet? They usually give you dose-to-clear value for
reference.

Best regards,

Isaac Chan, Ph.D.

Sr. Process Engineer
Work: 519.888.4567 x6014
"Innovate. Lead. Succeed."

On Tue, 10 Jan 2006, haixinzhu wrote:

> Hello,
>
> I am wondering where I can find the info regarding the requsted exposure
> dose for 1um thick OCG 825 (10um line width) and 10um AZP4620(10um line
> width). I believe the dose is related to the thickness and line width
> through some function or equation, but just could not find it out. Anyone
> can give me a hand?
>
> Thanks
>
> BTW: I am using Karl Suss aligner.