Greetings,
I don't believe the SU series are the correct materials for your
application.
Kind Regards
Walter
www.elume.com

-----Original Message-----
From: Prem Pal [mailto:[email protected]]
Sent: Wednesday, January 11, 2006 10:08 PM
To: General MEMS discussion
Subject: [mems-talk] SU-8 layer less than 1 um

Dear Researchers
Which SU-8 should I use for depositing a layer of thickness less than 1 um.
If any have done it, please give me the recipe for achieving this thickness
by spin coating.
Thanks in advance

Prem Pal
Yonsei University Seoul