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MEMSnet Home: MEMS-Talk: How to test the strength of Copper thin film?
How to test the strength of Copper thin film?
2006-01-13
Suhua Jiang
2006-01-13
Arun Kumar
How to test the strength of Copper thin film?
Suhua Jiang
2006-01-13
After I deposited 1 um copper thin film on Ta/Si-sub, How can I measure the
strength of the copper layer?
Thanks!


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