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MEMSnet Home: MEMS-Talk: Step coverage of Aluminum film over SiO2
Step coverage of Aluminum film over SiO2
2006-01-13
polly
2006-01-13
Isaac Chan
Step coverage of Aluminum film over SiO2
polly
2006-01-13
  Please guide me on the necessary thickness of Aluminum film over a SiO2 step
of 0.6 micron for getting good step coverage
reply
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