Hi Polly,

Not just the height of your SiO2 step is a concern of Al step coverage,
more important is the step profile angle. But since your step is just 0.6
micron and seems like you only worry about Al thickness for step coverage,
you should be able to deposit the same thickness as the step height to
reliably ensure step coverage.

Best regards,

Isaac Chan, Ph.D.

Sr. Process Engineer
Work: 519.888.4567 x6014
"Innovate. Lead. Succeed."

On Fri, 13 Jan 2006, polly wrote:

>   Please guide me on the necessary thickness of Aluminum film over a
> SiO2 step of 0.6 micron for getting good step coverage