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MEMSnet Home: MEMS-Talk: ohmic contact formation
ohmic contact formation
2006-01-13
polly
ohmic contact formation
polly
2006-01-13
dear sir,
i have deposited aluminum over native silicon dioxide and sintered it at 400 C
for 30 minutes. i would like to ask if in this situation aluminum will diffuse
through the oxide and form an ohmic contact with underlying silicon.

regards
Polly
reply
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