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MEMSnet Home: MEMS-Talk: Thermal conductivity & resistivity of silicon at high temperature
Thermal conductivity & resistivity of silicon at high temperature
2006-01-11
Kavin
Thermal conductivity & resistivity of silicon at high temperature
2006-01-15
G de Graaf
Thermal conductivity & resistivity of silicon at high temperature
G de Graaf
2006-01-15
C. Tai, C. H. Mastrangelo, and R. S. Muller, "Thermal conductivity of
heavily doped low-pressure chemical vapor deposited polycrystalline
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66 (7), pp. 3420, Oct. 1, 1989.

C. H. Mastrangelo and R. S. Muller, "Thermal diffusivity of heavily
doped low pressure chemical vapor deposited polycrystalline silicon
films," Sensors and Materials. Vol. 3, p. 133-137, 1988.
E. OberMeier and P. Kopystynski, Polysilicon as a material for
microsensor applications, Sensors and Actuators, A30 (1992), pp.149-155

N.C.C.Lu, L. Gerzberg and J.D. Meindl, A qualitative model of the effect
of grain size on the resistivity of polycrystalline silicon resistors,
IEEE Electron Devices Letters. EDl-1(3) ( 1980) pp. 38-40.

Thermal conductivity of doped polysilicon layers
McConnell, A.D.; Uma, S.; Goodson, K.E.;
Microelectromechanical Systems, Journal of
Volume 10, Issue 3, Sept. 2001 Page(s):360 - 369

Practical model for electrical properties of highly doped p-type polysilicon
Spoutai, S.V.;
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1.
4th International Conference on Actual Problems of
23-26 Sept. 1998 Page(s):27 - 2

and more  .......................

Succes
Ger de Graaf





Kavin wrote:

>Dear all,
>
>Do you anyone know what is the temperature (at
>temperature range of 300 degree C up to melting point)
>dependence of thermal conductivity and resistivity of
>doped, especially heavily doped, silicon?
>
>Thank you in advance.
>
>Best regards,
>
>Zhan
reply
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