Sokwon,

  Try TMAH for wet etching. Dry etching should not be a problem as
long as you can find an equipment.

Liang

On 12/30/05, sokwon Paik  wrote:
> Hi
>
>  I want to deposit polysilicon on top of Pyrex and want to etch out only
polysilicon area of designated part.
>
>  I don't want to etch Pyrex. So is there any dry/wet etching method I can etch
polysilicon area only?
>
>  One more question. Does anybody know the transmit wavelength of polysilicon?
>
>  thanks,
>
>  Sokwon