Anil
I think the simplest solution will be to have someone build you an aluminum
box with threaded holes for the gas connectors, one flush hole to which you
can glue (from the outside) a glass or ceramic electrical feed thru and
machine a round hole to which you have to glue, again from the outside, a
quartz , optical glass or sapphire(if you need IR transmission) window (you
can get these thru Edmund Scientific or the like) . Just make sure to place
you actuator in the box as close as possible to the window since the working
distance of some objectives is pretty short.
You will need a box with walls several mm thick since at any vacuum, the is
~1kg per square cm force.
Also, if it is hard to raise the sample towards the window, you can machine
in the box a conical opening that will fit the objective + some freeplay to
move around. Leave a 2mm thick edge on which to glue the window.
Shay

---Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Anil Agiral
Sent: Monday, January 16, 2006 11:16 AM
To: General MEMS discussion
Subject: [mems-talk] Vacuum chamber

Dear all,
I'm looking for a small vacuum chamber which will be placed under a
microscope. Inside the chamber I want to place a microreactor
which will work under few milibars.The dimensions of the chamber can be
something like 2"x4" with a height
of about 1" (can be made of quartz, sides can be any vacuum sealing
material). I need two electrical contacts, one gas inlet and one gas
outlet..
Does anybody have an idea, where I can buy such a vacuum
chamber or how to get information about construction?

Thanks in advance,
Anil