Hi, All,

   I expose a thick SU-8 2100 layer with a 320nm laser. After postbake, I
found out the layer is curved up.
   The picture is shown in the link below.

   http://base.google.com/base/items?oid=15423750006658009412

   We used a broadband UV  before for exposure and we never have the problem
like this with the same layer of SU-8.
   Any suggestion would be appreciated.
   Thank you.

Richard