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MEMSnet Home: MEMS-Talk: TiW etching in hydrogen peroxide
TiW etching in hydrogen peroxide
2006-01-18
adnan merhaba
2006-01-18
Richard
TiW etching in hydrogen peroxide
adnan merhaba
2006-01-18
Hello all,

I am trying to buy some hydrogen peroxide for TiW
etching and there are all sorts of grades and
concentration available out there. Does anyone know
which one is most suited for TiW etching?

Regards,
Adnan Merhaba
reply
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