Hi, Adnan,

   We use 30% concentration H2O2 to etch TiW. You can heat it up to 40-60
degree C. That would accelerate the etching.

Best,

Richard

----- Original Message -----
From: "adnan merhaba" 
To: 
Sent: Wednesday, January 18, 2006 6:41 AM
Subject: [mems-talk] TiW etching in hydrogen peroxide


> Hello all,
>
> I am trying to buy some hydrogen peroxide for TiW
> etching and there are all sorts of grades and
> concentration available out there. Does anyone know
> which one is most suited for TiW etching?