you can write an alignment mark and evaporated metal like Au which is
easy to see for the next writing.

best

Yu Chen



Quoting Z Destro :

> Hi all,
> I am wondering how to make the alignment when we are trying to make
> multilayers using e-beam lithography. as for photolithography, we can use
> alignment mark on masks to make sure the structure on different layers are
> correctly aligned. but for E-beam lighography, I have no idea. Could anyone
> explain it for me?